HRVATSKO DRUŠTVO ZA ZAŠTITU MATERIJALA

CROATIAN SOCIETY FOR MATERIALS PROTECTION

PREGLED METODA MJERENJA DEBLJINE TANKIH PREVLAKA

OVERVIEW OF THE MEASURING METHODS OF THE THICKNESS OF THE THIN COATINGS

SAŽETAK

U radu su prikazane metode mjerenja debljine tankih prevlaka te je razjašnjena prednost nedestruktivnih metoda u odnosu na destruktivne. Opisane su magnetska metoda, metoda vrtložnih struja, spektrometrijska metoda X-zrakama te metoda povratnog zračenja ß-zraka. Ujedno su za te metode navedeni uvjeti rada, ograničenja i utjecajni faktori na točnost mjerenja. Posebna pažnja je dana umjeravanju mjernih uređaja.

KLJUČNE RIJEČI
mjerenje debljine, nedestruktivne metode, podloga, prevlaka, debljina prevlake

SUMMARY

In this paper the measuring methods of the thickness of the thin coatings have been described. We have tried to explain the advantages of the use of the non-destructive methods in comparison with the destructive ones. This work describes the use of the magnetic methods, methods of the eddy current, spectrographic method using X-rays and reverse dispersion of ß-rays. Besides the certain methods also the terms of work, limitation, and influential factors on the currency of the measuring have been described.

KEYWORDS
measuring of the thickness, non-destructive methods, substrate, coating, thickness of the coating